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We summarized the current development standing on the higher-electric power DUV laser both of those within the wavelength of FHG of your one-μm laser and at 193 nm. The new enhancement of your strong-point out/fiber laser, plus the nonlinear optical crystals, prompts not merely the average ability but additionally the beam quality (coherence) on the DUV lasers to an unparalleled stage.
For instance, The existing concave OC could be replaced by a plane mirror which could mitigate the facility density about the surface area of M1 and the diamond. What's more, working with high destruction threshold coatings for M1 and diamond would also improve the output electric power without any damages. Then, the NIR laser on the 2nd Stokes wavelength could be significant sufficient, together with its great beam excellent, to produce the final DUV laser at 193 nm which has a higher normal energy.
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On the other facet, the ability scaling from the NIR laser is yet another part to improve the regular energy of the 193-nm DUV laser. Mainly because of the insufficient the high-electric power amplification Remedy of your NIR laser (by way of example at 1553 nm), nonlinear frequency procedures which include optical parameter oscillation (OPO) might be applied to establish a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength in addition to acquiring relative higher electrical power [21]. A short while ago, a diamond Raman laser showed its capacity in accomplishing a superior CLBO Crystal energy plus a substantial conversion performance for the 1st Stokes of your one-μm laser [22,23], which means the chance to generally be used during the 193-nm DUV laser technology thanks to its superior Raman get and huge frequency shift.
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Tunable ultraviolet laser source according to sound-state dye laser engineering and CsLiB6O10 harmonic generation
The conversion performance from basic NIR to DUV is from five% to 36% according to the claimed ends in Desk 1. Expanding the conversion effectiveness will lessen the burden on the design and set up of the fundamental laser amplifier and also the electric electric power consumption. A superb beam quality of the basic laser can even add into the rising of your conversion performance in addition to the suitable electric power depth with the NIR and environmentally friendly laser in the SHG and FHG procedure, respectively. The highest conversion efficiencies from NIR to green and green to DUV laser by utilization of CLBO crystal are 70% and close to 50%, respectively [12], which corresponds to the conversion performance of 35% from elementary to DUV.
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